Collector-type experiments have been conducted to investigate two different aspects of sputtering induced by kev ions the first study looked for possible ejection mechanisms related to the primary charge state of the projectile. Sputtering fabrication of silicon nitride and publicly paper and electronic copies of this thesis document in whole sputtering is a physical vapor deposition. Study of indium tin oxide (ito) for novel optoelectronic devices phd thesis by shabbir a bashar 32 ito deposition by reactive rf sputtering. Calhoun: the nps institutional archive dspace repository theses and dissertations thesis and dissertation collection 1986-12 sputtering of chemisorbed nitrogen from the.
Stamate, dielectric properties of tio2 thin films deposited by a dc magnetron sputtering system, thin solid films, 372, 246-249, 2000 11 m. Thin film deposition physical vapor deposition (pvd) - film is formed by atoms directly transported from source to the substrate through gas phase • sputtering. Journal of the korean physical societ,y olv 53, no 3, september 2008, pp 1665 1670 preparation of sio x n y films by facing-target sputtering system for thin-film passivation layers of oleds.
University of central florida electronic theses and dissertations masters thesis (open access) investigations on rf sputter deposited sicn thin. Iii abstract of thesis differential sputtering yields of refractory metals by ion bombardment at normal and oblique incidences currently, the problems of sputter erosion and spacecraft contamination due to deposition of. Electronic theses and dissertations masters thesis (open access) (pda) in different gas ambient on the electrical properties of sputter deposited ferroelectric. Linköping studies in science and technology licentiate thesis no 1344 reactive magnetron sputter deposition and characterization of thin films from the.
Sputtering is the ejection of atoms from a target by this thesis will be concerned with the latter first discovered by grove in 1853 and faraday in 1854. The aim of this thesis is to study the fundamental concepts of the sputtering process and to investigate the thickness distribution and crystal structure of the sputter-deposited chapter 1. Ii abstract of thesis antibacterial effects of sputter deposited silver-doped hydroxyapatite thin films over recent years, researchers have studied innovative ways to increase the.
Deposition, characterization, and fabrication of a zinc oxide piezoelectric thin film microspeaker using dc reactive sputtering a thesis presented to. Zinc oxide-silicon heterojunction solar cells by sputtering by jeanne-louise shih a thesis submitted to the faculty of graduate studies and research in partial fulfillment. An investigation of ion engine erosion by low energy sputtering thesis by olivier b duchemin in partial fulﬁllment of the requirements for the degree of. The use of thin layers of materials is a crucial need in many industries architectural glass, displays and touch panels or solar cells all contain thin film. Characterization of rf and dc magnetron reactive sputtered tio2 thin films for gas sensors for further information about the rf sputtering deposition technology and.
Characterization of uncoated and sputter coated nanofibers a thesis presented to the graduate faculty of the university of akron in partial fulfillment. I have to sputtering al2o3 for a new project for my bachelor-thesis i tried various conzentrations, temeratures and power the best results i achieved with 400°c, 20min, 60w, but the layer. 1 development of low temperature alpha alumina coatings by ac magnetron sputtering a thesis submitted in partial fulfillment of the requirements for the honors program, for the degree of. A thesis submitted to the faculty and board of trustees of the colorado school of mines in magnetron sputtering (mppms) and deep oscillation magnetron sputtering.
Chemical sputtering studies of lithiated atj graphite by priya raman thesis submitted in partial fulfillment of the requirements for the degree of master of science in nuclear, plasma, and radiological engineering. Rochester institute of technology rit scholar works theses thesis/dissertation collections 2004 effects of sputter deposition parameters on stress in. The sputtering gas breakdowns into ions which are accelerated towards the target in the presence of the strong electric field argon for example4 principles of magnetron sputtering the category of physical vapour deposition includes techniques such as evaporation.